Hikavyy, Andriy
Interuniversity Microelectronics Centre (IMEC)
Belgium, Лёвен
Report
- Zyulkov I.J.*, Hikavyy A.**
Strained SiGe layers growth with digermane/disilane precursors combination
*ОАО "Научно исследовательский институт молекулярной электроники" (Moscow), Russia
**Interuniversity Microelectronics Centre (IMEC) (Лёвен), Belgium