Козельская, Анна Ивановна

Institute of Strength Physics and Materials Science SB RAS
http://www.ispms.ru
Russia, 634021, Tomsk, pr. Academicheskii, 2/1
Phone: +7(382-2) 49-18-81, Fax: +7(382-2) 49-25-76

Report

• Semenova O.I.^*, Козельская А.И.^**, Спесивцев Е.В.^***
  Механические напряжения в плазмохимическом SiNx:H
  ^*A.V. Rzhanov Institute of Semiconductor Physics of SB RAS (Novosibirsk), Russia
  ^**Institute of Strength Physics and Materials Science SB RAS (Tomsk), Russia
  ^***United Institute of Semiconductor Physics SB RAS (Novosibirsk), Russia
  

To participants list