Шаяпов, Владимир

Nikolaev Institute of Inorganic Chemistry of SB RAS
http://www.che.nsk.su
Russia, 630090, Novosibirsk, Acad. Lavrentieva ave., 3
Phone: +7(383) 330-94-90, Fax: +7(383) 330-94-89

Report

• Румянцев Ю.^*, Плеханов А.^*, Файнер Н.^*, Максимовский е.^*, Шаяпов В.^*, Юшина И.^*
  Hydrogenated silicon oxycarbonitride films - promising materials for opto - and nanoelectronics
  ^*Nikolaev Institute of Inorganic Chemistry of SB RAS (Novosibirsk), Russia
  

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